Quartz Washer

A fully-automated 2-Stage washing system for quartz tubes and components

Self-contained cleaning system for quartz furnace tubes (φ130-φ300-φ450)
Appliable solvents include Hydrogen florine, nitric acid and hydrogen peroxide
Tool Dimensions: W2500~3500 H2000~2500 D900~1500 (mm)
(Vertical tube washer machines can also be produced upon request)

Mask Washer

An easy-to-use mask-washing machine that delivers a single mask or an entire cassette through an automated wash and dry process

①　Sulfate Bath: Masks are dipped in processing solvent set at 80℃
②　Dip & Rinse Bath1: Initial water-based wash in overflow Bath1
③　Dip & Rinse Bath2: Final water-based wash in overflow Bath2
④　Spin Dryer: Holders and cassettes spin-dried in manual or auto mode

Semiconductor/ Hard Disc Manufacturing Tools

Supplementary Tools　　　 Laboratory Tools