　Chemical Supply Unit

5-inch wafers are etched and rinsed in DI Water in a completely automated process. 2 pressurized pumps send processing solvents via a vibrating spray nozzle that showers moving wafers on a conveyor unit. The duration of of each etch/rinse process cycles, as well as the speed settings for the conveyor unit can be programmed on the tool's main panel.
PVC, PP or Stainless Steel Body 　Solvents Used: Acid, alkali liquid etc.
Others: Automatic/Manual controls, liquid circulator with multi-filtration, temperature controls and pH Adjuster.

Gas Scrubber

A pollution-control device that showers off organic and acid exhaust emissions from your factory equipment.
PVC or PP frame
Exhaust Rate:　２０m³/min
Fail-safe water-leak interlock included
Dimensions：　W1995　X　D1020　X　H600　（mm）
　　　　　　　　　　　
　　　　　　　　　　　　　　　　　　　　　　　　　　

Clean Storage Unit

Available in various sizes to store masks and wafers.
Storage dimensions can be altered upon request.

Clean Unit

Aluminum casing, sleek design
Wide variety of sizes available
Hydrogen floride resistant hepafilters provided
Filtering rate: 0.3μ　0.1μ　0.05μ

Clean Booth

Wide variety of sizes available from simple booths to wide-scale laboratory booths.

Semiconductor/ Hard Disc Manufacturing Tools　　　　　

Washer Tools 　　　　　Laboratory Tools